Characterization of the crystal structure of In-Ga-Zn-O materials via Precession Electron Diffraction

• Agati Marta Antonella,
• Parida Pradyumna Kumar,
• Richard Olivier,
• Galanis Athanassios S.,
• Dekkers Harold,
• Grieten Eva,
• Favia Paola

Affiliations

Agati Marta Antonella

IMEC

Parida Pradyumna Kumar

IMEC

Richard Olivier

IMEC

Galanis Athanassios S.

NanoMegas

Dekkers Harold

IMEC

Grieten Eva

IMEC

Favia Paola

IMEC