Influence of vacuum annealing temperature on the structure and properties of AlCrSiN/Mo self-lubricating coatings

MENG De-qiang; WANG Tie-gang; PENG Yong; KE Pei-ling; ZHU Qiang; XU Ren-ren; LIU Qian

doi:10.11868/j.issn.1001-4381.2019.001174

Cailiao gongcheng (Jan 2021)

Influence of vacuum annealing temperature on the structure and properties of AlCrSiN/Mo self-lubricating coatings

MENG De-qiang,
WANG Tie-gang,
PENG Yong,
KE Pei-ling,
ZHU Qiang,
XU Ren-ren,
LIU Qian

Affiliations

MENG De-qiang: Tianjin Key Laboratory of High Speed Cutting and Precision Manufacturing, Tianjin University of Technology and Education, Tianjin 300222, China
WANG Tie-gang: Tianjin Key Laboratory of High Speed Cutting and Precision Manufacturing, Tianjin University of Technology and Education, Tianjin 300222, China
PENG Yong: Tianjin Key Laboratory of High Speed Cutting and Precision Manufacturing, Tianjin University of Technology and Education, Tianjin 300222, China
KE Pei-ling: Key Laboratory of Marine Materials and Related Technologies, Ningbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences, Ningbo 315201, Zhejiang, China
ZHU Qiang: Tianjin Key Laboratory of High Speed Cutting and Precision Manufacturing, Tianjin University of Technology and Education, Tianjin 300222, China
XU Ren-ren: Tianjin Key Laboratory of High Speed Cutting and Precision Manufacturing, Tianjin University of Technology and Education, Tianjin 300222, China
LIU Qian: Tianjin Key Laboratory of High Speed Cutting and Precision Manufacturing, Tianjin University of Technology and Education, Tianjin 300222, China

DOI: https://doi.org/10.11868/j.issn.1001-4381.2019.001174
Journal volume & issue: Vol. 49, no. 1
pp. 126 – 132

Abstract

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The AlCrSiN/Mo self-lubricating coating was prepared by hybrid technology of high power impulse magnetron sputtering and pulsed DC magnetron sputtering, and the structure and properties were modified by vacuum annealing. The influence of vacuum annealing temperature on composition, microstructure, mechanical and tribological properties of AlCrSiN/Mo coatings was systematically investigated by scanning electron microscope, X-ray diffractometer, electron probe analyzer, nano-indentation tester, scratch tester and friction and wear tester. The results show that all the AlCrSiN/Mo coatings possess the nanocomposite structure, namely the nc-(Al,Cr,Mo)N is surrounded by a-Si3N4 amorphous phase. After vacuum annealing, the particle size on the coating surface is increased significantly, whereas the nanohardness and critical load of the coatings are decreased correspondingly, and the wear resistance and antifriction performance are improved significantly. After being annealed at a temperature of 700 ℃, the coating presents the optimum properties with a nanohardness of 18.3 GPa, a friction coefficient of 0.51 and a wear rate of 3.4×10-4 μm3·(N·μm)-1. In this case, the characteristic values of H/E and H3/E*2 keep the highest.

Published in Cailiao gongcheng

ISSN: 1001-4381 (Print)
Publisher: Journal of Materials Engineering
Country of publisher: China
LCC subjects: Technology: Electrical engineering. Electronics. Nuclear engineering: Materials of engineering and construction. Mechanics of materials
Website: http://jme.biam.ac.cn/CN/1001-4381/home.shtml

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