CARACTERIZATION OF THIN FILMS BY X’Pert-PRO PANalytical DIFRACTOMETER

Abstract

In this work, the structural characterization of thin films using a conventional diffraction equipment, brand X'Pert PRO PANalytical X-rays is described. A brief review of the theoretical diffraction techniques and X-ray reflectivity is included. In the experimental part the conditions necessary for the assembly of the samples were determined on the computer using the settings grazing incidence and X-ray reflectivity. 11 different thin film samples were tested and the results of thickness and lattice parameter were obtained by the X'Pert HighScore Plus and X'pert Reflectivity programs respectively. The results suggest the feasibility of using a conventional X-ray equipment for the characterization of thin films.

Keywords

• Película delgada
• Difracción de rayos-X de haz rasante
• reflectividad de rayos-X.