Modelling and characterization of a travelling-wave electro-optic modulator on InP

Abstract

A fast travelling-wave Mach-Zehnder modulator is modelled and designed using a rigorous vectorial analysis. In order to investigate propagation characteristics, velocity and microwave loss, the semiconductor layer stack and the lossy electrodes are modelled using the method of lines. The microwave field distribution is determined, design curves are derived and the cross-sectional dimensions of the modulator are optimized. The loss of the fabricated device agrees very well with small signal measurements up to 40 GHz and HFSS simulations.