Improvement of triple-junction (3J) III-V/Ge solar cells efficiency is hindered by the low current produced by the top and middle cells relative to the bottom cell (Ge). This can be explained by the difficulty of characterizing, on an individual basis, the subcells. We investigate the fabrication process of multi-terminal multi-junction solar cells (MTMJSC) and its potential as a promising architecture to independently characterize subcells of multi-junction solar cells. Here, we study monolithic triple-junction solar cells, with an InGaP top cell, an InGaAs middle cell and a Ge bottom cell interconnected by tunnel junctions. We demonstrate a fabrication process for MTMJSC on commercial wafers for characterization applications purposes. I-V measurements, under illumination, of two-terminals and MTMJSC were compared to validate that the MTMJSC fabrication process does not degrade the cells’ performance. The dark current of each subcell was also measured and an ideal-diode model used to determine the subcells electrical parameters. The results suggest a method to measure the relative absorption and the opto-electrical couplings between the subcells unambiguously, through EQE and electroluminescence measurements, based on basic micro-fabrication processes.