The Impact of Housing on the Characteristics of Ceramic Pressure Sensors—An Issue of Design for Manufacturability

Abstract

An exploratory study of the impact of housing on the characteristics of a low-temperature co-fired ceramic (LTCC) pressure sensor is presented. The ceramic sensor structure is sealed in a plastic housing. This may have non-negligible effect on the final characteristics and should be considered in the early design phase. The manufacturability issue mainly concerning the selection of available housing and the most appropriate materials was considered with respect to different requirements for low and high pressure ranges of operation. Numerical predictions showed the trends and helped reveal the critical design parameters. Proper selection of the adhesive material remains an essential issue. Curing of the epoxy adhesive may introduce non-negligible residual stresses, which considerably influence the sensor’s characteristics.

Keywords

• LTCC
• pressure-sensor
• wet-wet application
• residual stresses
• finite-element analysis