Design of a MEMS-Based Capacitive Resonator for Target Analyte Detection

• Serdar Tez,
• Ergun Aytaşkın

Affiliations

Serdar Tez

Department of Electrical and Electronics Engineering Pamukkale University Faculty of Engineering, Denizli, Turkey

Ergun Aytaşkın

Department of Electrical and Electronics Engineering, Pamukkale University, Graduate School of Natural and Applied Sciences, Denizli, Turkey