Study of SiOx thickness effects on aluminum-induced crystallization

Abstract

The thickness effects of SiOx which was deposited as an intermediate layer between aluminum and silicon were studied on Aluminum-induced crystallization (AIC). The SiOx layer thickness varied from 2 nm to 20 nm and affected the crystallization process of the AIC. In the case of the thin SiOx layer, crystallized silicon morphology showed kinetic-limited aggregation. On the other hand, crystallized silicon processed with the thick SiOx layer showed diffusion-limited aggregation due to slow silicon diffusion velocity. Kinetic-limited aggregation showed large grain. The schematic crystallization model was used to describe the relationship between crystallization and grain size in this paper.