Micromachines (Apr 2019)

Editorial for the Special Issue on MEMS Accelerometers

  • Mahmoud Rasras,
  • Ibrahim (Abe) M. Elfadel,
  • Ha Duong Ngo

DOI
https://doi.org/10.3390/mi10050290
Journal volume & issue
Vol. 10, no. 5
p. 290

Abstract

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Micro-Electro-Mechanical Systems (MEMS) devices are widely used for motion, pressure, light, and ultrasound sensing applications [...]

Keywords