Micromachines (Apr 2019)
Editorial for the Special Issue on MEMS Accelerometers
Abstract
Micro-Electro-Mechanical Systems (MEMS) devices are widely used for motion, pressure, light, and ultrasound sensing applications [...]
Keywords
Micromachines (Apr 2019)
Micro-Electro-Mechanical Systems (MEMS) devices are widely used for motion, pressure, light, and ultrasound sensing applications [...]