3D Printed Pressure Sensor Based on Surface Acoustic Wave Resonator

Hu Baofa; Li Zhiwei; Wan Yuanjie; Zhou Peng; Zhang Chunquan; San Haisheng

doi:10.2478/msr-2021-0011

Measurement Science Review (Jun 2021)

3D Printed Pressure Sensor Based on Surface Acoustic Wave Resonator

Hu Baofa,
Li Zhiwei,
Wan Yuanjie,
Zhou Peng,
Zhang Chunquan,
San Haisheng

Affiliations

Hu Baofa: Pen-Tung Sah Institute of Micro-Nano Science and Technology, Xiamen University, Xiamen361005, China
Li Zhiwei: Pen-Tung Sah Institute of Micro-Nano Science and Technology, Xiamen University, Xiamen361005, China
Wan Yuanjie: School of Electronic Science and Engineering, Xiamen University, Xiamen361005, China
Zhou Peng: Pen-Tung Sah Institute of Micro-Nano Science and Technology, Xiamen University, Xiamen361005, China
Zhang Chunquan: Pen-Tung Sah Institute of Micro-Nano Science and Technology, Xiamen University, Xiamen361005, China
San Haisheng: Pen-Tung Sah Institute of Micro-Nano Science and Technology, Xiamen University, Xiamen361005, China

DOI: https://doi.org/10.2478/msr-2021-0011
Journal volume & issue: Vol. 21, no. 3
pp. 76 – 81

Abstract

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This paper reports a 3-dimentional (3D) pressure sensor based on surface acoustic wave (SAW) resonators. The SAW resonators were designed and fabricated on 128°Y-X LiNbO3 substrate using the MEMS technology. The pressure sensing structure was 3D-printed using polyactic acid plastic, and two SAW resonators were integrated in the 3D-printed chamber structure for both temperature and pressure sensing. The SAW-based gas pressure sensors demonstrate a sensitivity of 589 ppm/MPa at the pressure range of 100-600 kPa and temperature of 40 °C.

Published in Measurement Science Review

ISSN: 1335-8871 (Online)
Publisher: Sciendo
Country of publisher: Poland
LCC subjects: Science: Mathematics
Website: https://sciendo.com/journal/MSR

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