PaperThe Impact of ExternallyApplied Mechanical Stress on Analogand RF Performances of SOI MOSFETs

Abstract

his paper presents a complete study of the impactof mechanical stress on the performance of SOI MOSFETs.This investigation includes dc, analog and RF characteristics.Parameters of a small-signal equivalent circuit are also ex-tracted as a function of applied mechanical stress. Piezore-sistance coefficient is shown to be a key element in describingthe enhancement in the characteristics of the device due tomechanical stress.

Keywords

• cutoff frequency fT
• intrinsic gain
• mechanical stress
• piezoresistance coefficiet
• SOI MOSFET