Gate protection for vertical gallium nitride trench MOSFETs: The buried field shield☆

Abstract

This paper describes a process for forming a buried field shield in GaN by an etch-and-regrowth process, which is intended to protect the gate dielectric from high fields in the blocking state. GaN trench MOSFETs made at Sandia serve as the baseline to show the limitations in making a trench gated device without a method to protect the gate dielectric. Device data coupled with simulations show device failure at 30% of theoretical breakdown for devices made without a field shield. Implementation of a field shield reduces the simulated electric field in the dielectric to below 4 MV/cm at breakdown, which eliminates the requirement to derate the device in order to protect the dielectric. For realistic lithography tolerances, however, a shield-to-channel distance of 0.4 μm limits the field in the gate dielectric to 5 MV/cm and requires a small margin of device derating to safeguard a long-term reliability and lifetime of the dielectric.

Keywords

• Gallium nitride
• Vertical GaN
• Trench MOSFET
• Gate oxide protection
• Buried field shield