Secondary electron emission from insulators and negative electron affinity semiconductors

Abstract

Based on expression of primary range R and the R at Epo ≥ 10.0 keV and L at Epo ≥ 1.0 keV calculated by ESTAR program [1], the method of obtaining formula for R at Epo ≥ 1.0 keV is presented; where Epo is incident energy of primary electron, and L is the energy loss of primary electron per unit path length at the incident surface of the materials. Based on the obtained formula for R, experimental δ, relationships among parameters of δ and the processes and characteristics of secondary electron emission SEE, the universal formula for δ is deduced and the method of calculating δ at Epo ≥ 1.0 keV of insulators and negative electron affinity NEA semiconductors is presented and experimentally proved, where δ is secondary electron yield. The methods of calculating mean escape depth of secondary electrons 1/α and B of insulators and NEA semiconductors are presented, respectively; where B is the probability that an internal secondary electron escapes into vacuum upon reaching the surface of emitter. From the relationships among parameters of SEE and the comparison between the values of 1/α and B obtained in this study and those obtained in former work, it concludes that the methods of calculating 1/α and B are correct.

Keywords

• Insulators and negative electron affinity semiconductors
• Primary range
• Secondary electron yield
• Mean escape depth of secondary electrons
• The probability