Material-specific high-resolution table-top extreme ultraviolet microscopy

Wilhelm Eschen; Lars Loetgering; Vittoria Schuster; Robert Klas; Alexander Kirsche; Lutz Berthold; Michael Steinert; Thomas Pertsch; Herbert Gross; Michael Krause; Jens Limpert; Jan Rothhardt

doi:10.1038/s41377-022-00797-6

Light: Science & Applications (Apr 2022)

Material-specific high-resolution table-top extreme ultraviolet microscopy

Wilhelm Eschen,
Lars Loetgering,
Vittoria Schuster,
Robert Klas,
Alexander Kirsche,
Lutz Berthold,
Michael Steinert,
Thomas Pertsch,
Herbert Gross,
Michael Krause,
Jens Limpert,
Jan Rothhardt

Affiliations

Wilhelm Eschen: Institute of Applied Physics, Abbe Center of Photonics, Friedrich-Schiller-Universität Jena
Lars Loetgering: Institute of Applied Physics, Abbe Center of Photonics, Friedrich-Schiller-Universität Jena
Vittoria Schuster: Institute of Applied Physics, Abbe Center of Photonics, Friedrich-Schiller-Universität Jena
Robert Klas: Institute of Applied Physics, Abbe Center of Photonics, Friedrich-Schiller-Universität Jena
Alexander Kirsche: Institute of Applied Physics, Abbe Center of Photonics, Friedrich-Schiller-Universität Jena
Lutz Berthold: Fraunhofer Institute for Microstructure of Materials and Systems IMWS
Michael Steinert: Institute of Applied Physics, Abbe Center of Photonics, Friedrich-Schiller-Universität Jena
Thomas Pertsch: Institute of Applied Physics, Abbe Center of Photonics, Friedrich-Schiller-Universität Jena
Herbert Gross: Institute of Applied Physics, Abbe Center of Photonics, Friedrich-Schiller-Universität Jena
Michael Krause: Fraunhofer Institute for Microstructure of Materials and Systems IMWS
Jens Limpert: Institute of Applied Physics, Abbe Center of Photonics, Friedrich-Schiller-Universität Jena
Jan Rothhardt: Institute of Applied Physics, Abbe Center of Photonics, Friedrich-Schiller-Universität Jena

DOI: https://doi.org/10.1038/s41377-022-00797-6
Journal volume & issue: Vol. 11, no. 1
pp. 1 – 10

Abstract

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The combination of a state-of-the-art high harmonic source, structured EUV light, and advanced ptychography reconstruction algorithms enables material-specific high-contrast and high-resolution imaging on the nanoscale.

Published in Light: Science & Applications

ISSN: 2047-7538 (Online)
Publisher: Nature Publishing Group
Country of publisher: United Kingdom
LCC subjects: Technology: Engineering (General). Civil engineering (General): Applied optics. Photonics; Science: Physics: Optics. Light
Website: https://www.nature.com/lsa/

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