Ultra-high-enhancement-factor integrated long-wave infrared gas sensor based on the tapered sub-wavelength grating slot waveguide

Dong Zhang; Yuefeng Wang; Qiang Fu; Weiwei Chen; Pengjun Wang; Shixun Dai; Jun Li; Tingge Dai; Jianyi Yang

Results in Physics (May 2023)

Ultra-high-enhancement-factor integrated long-wave infrared gas sensor based on the tapered sub-wavelength grating slot waveguide

Dong Zhang,
Yuefeng Wang,
Qiang Fu,
Weiwei Chen,
Pengjun Wang,
Shixun Dai,
Jun Li,
Tingge Dai,
Jianyi Yang

Affiliations

Dong Zhang: Faculty of Electrical Engineering and Computer Science, Ningbo University, Ningbo 315211, China
Yuefeng Wang: Faculty of Electrical Engineering and Computer Science, Ningbo University, Ningbo 315211, China
Qiang Fu: College of Science and Technology, Ningbo University, Ningbo 315300, China
Weiwei Chen: Faculty of Electrical Engineering and Computer Science, Ningbo University, Ningbo 315211, China; Corresponding authors.
Pengjun Wang: College of Electrical and Electronic Engineering, Wenzhou University, Wenzhou 325035, China; Corresponding authors.
Shixun Dai: Faculty of Electrical Engineering and Computer Science, Ningbo University, Ningbo 315211, China; Laboratory of Infrared Materials and Devices, The Research Institute of Advanced Technologies, Ningbo University, Ningbo 315211, China
Jun Li: Faculty of Electrical Engineering and Computer Science, Ningbo University, Ningbo 315211, China
Tingge Dai: Department of Information Science and Electronics Engineering and Cyrus Tang Center for Sensor Materials and Applications, Zhejiang University, Hangzhou 310027, China
Jianyi Yang: Department of Information Science and Electronics Engineering and Cyrus Tang Center for Sensor Materials and Applications, Zhejiang University, Hangzhou 310027, China

Journal volume & issue: Vol. 48
p. 106442

Abstract

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In this paper, an on-chip long-wave infrared gas sensor using the tapered sub-wavelength grating slot waveguide is proposed, designed, and analyzed in detail. At an operating wavelength of 7.70 μm, the slow-light enhancement factor of the designed waveguide gas sensor can reach 6.1516 by introducing the slow-light effect and carefully optimizing structural parameters. When the methane is treated as the target gas, the sensitivity and limit of detection are 19.0341 and 0.18524 ppm, respectively. If nitrous oxide is regarded as the target gas, the corresponding sensitivity and limit of detection will be 159.2375 and 0.02173 ppm.

Published in Results in Physics

ISSN: 2211-3797 (Online)
Publisher: Elsevier
Country of publisher: Netherlands
LCC subjects: Science: Physics
Website: http://www.journals.elsevier.com/results-in-physics/

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