Liquid Viscosity Sensor Using a Surface Acoustic Wave Device for Medical Applications Including Blood and Plasma

Abstract

Blood viscosity is the defining health indicator for hyperviscosity syndrome patients. This paper introduces an alternative approach for the real-time monitoring of blood viscosity by employing a surface-horizontal surface acoustic wave (SH-SAW) device at room temperature. A novel bi-layer waveguide is constructed on top of the SAW device. This device enables the SAW sensing of liquid droplets utilizing a bi-layer waveguide, consisting of a zinc oxide (ZnO) enhancement layer and Parlyene C, that facilitates the promotion of the surface horizontal mode. The ZnO piezoelectric thin-film layer enhanced the local particle displacement and dielectric coupling while the Parylene C layer constrained the wave mode at the interface of the piezoelectric material and polymer material. The device was tested with a liquid drop on the SAW delay-line path. Both experimental and finite element analysis results demonstrated the benefits of the bi-layer waveguide. The simulation results confirmed that the displacement field of local particles increased 9 times from 1.261 nm to 11.353 nm with the Parylene C/ZnO bi-layer waveguide structure. The device demonstrated a sensitivity of 3.57 ± 0.3125 kHz shift per centipoise enabling the potential for high precision blood viscosity monitoring.

Keywords

• surface acoustic waves
• SH-SAW
• quartz
• ZnO
• waveguide
• piezoelectric thin-film