Design Of Piezoelectric Microcantilever Chemical Sensors In COMSOL Multiphysics Area

Abstract

This paper offers an analytical modeling ofthin-filmed, multi-layer piezoelectric microcantileversthat are used as MEMS sensors. These sensors arechemical kind and use piezoelectric microcantilever.These types of microcantilevers are covered withvariety of unique probe coating. The sensor has highsensitivity with external voltage measured in mV anduses PSD1 system to indentify chemical ingredients ofmaterials. The identification of the chemical ingredientof materials is based on change in angle of microcantilever in the liquid or gas environment. Thedeflection of microcantilever results in varying voltagethat can be used to analyze materials. Analyticalsimulation using Cosmol software and theoreticalcomputations using equations will be offered in orderto determine the parameters for optimal design setting.The analytical simulation includes design of mems andCosmol software model development. The analyticalmodel of the cantilever will be analyzed and theprocess of its construction will be discussed.

Keywords

• Piezoelectric 1
• MEMS 2
• Microcantilever 3
• COMSOL modeling and simulation4
• Chemical Sensors5