Tuning resistivity and transmittance of AZO films through the electro-chemical treatment

Abstract

Aluminum-doped zinc oxide (AZO) films were prepared by radio-frequency magnetron sputtering from powder target, and the photo-electric properties of the films were tuned by the electrical and chemical interactions. The microstructure and photo-electrical properties of the films were characterized by Raman spectroscopy, X-ray diffraction (XRD), UV-visible spectrophotometer and Hall Effect apparatus. The results show both resistivity and transmittance of the AZO film treated under the electrical and chemical action decrease as the pH of the electrolyte decreases. At pH = 5, the photo-electric property of the treated AZO film is the most excellent. The resistivity is reduced to 3,7×10-3 Ω・cm from 7,1×10-1 Ω・cm of the as-prepared AZO film, and the transmittance is reduced to 90,1 % from 91,3 % of the as-prepared AZO film.

Keywords

• AZO film
• electro-chemical treatment
• properties
• resistivity
• transmittance