Development of a dichroic mirror based on Nb2O5/SiO2 for LiDAR systems

Abstract

This work focuses on designing a dichroic mirror for a LiDAR system. An approach for selecting materials for interference optical coatings was established. Based on this approach, Nb2O5 and SiO2were chosen as coating materials. An interference coating design composed of alternating Nb2O5 and SiO2 layers on a quartz glass substrate was modeled for the LiDAR system. A dichroic mirror was fabricated according to the calculated design. The interference coating consisted of 26 layers with a maximum thickness of 600 nm, resulting in a total coating thickness of 10140 nm. The fabricated dichroic mirror exhibits reflection coefficients of R ≤ 99.6% and R ≤ 0.4% for the spectral ranges of 1950-2100 nm and 2200-2300 nm, respectively.