Fabrication of silver helix microstructures in a large area by a two-photon absorption DLW method

Abstract

Abstract Large-area helix microstructures intended for metamaterials were fabricated using a negative photoresist, SU-8 using a two photon absorption direct laser writing (TPA-DLW). Two types of helix structures were fabricated. One type is those with no neighboring distance. In this case, compact helix structures with radius of 2.5 and 1.0 μm were fabricated. Another type is those with enough neighboring distance. The helix structures with shorter neighboring distance below 6.0 μm were collapsed, whereas those with longer neighboring distance more than 6.5 μm, free-standing helix structures could successfully be built. To stabilize the fabricated free-standing helix microstructures with a 1 μm radius, circular foundations with a radius of 1.3 μm and elevation angle of 10, 12, or 14° were built in advance. The foundation is useful to avoid collapsing the helix microstructures. Due to the useful foundation, over 18,000 helical structures were fabricated in a large area. The fabricated helical structures were coated with silver using an electroless plating method to produce 3D metallic helix structures. Silver coating was measured using a EDX measurement. The obtained helical structures have the potential for metamaterials to control the handedness of a circularly polarized infrared beam.