Transport of F- ions in gaseous environment for technological applications

Abstract

In this work we present swarm data obtained for F- ions in atomic and molecular gases necessary to form the global models for the complex collisional plasmas. We also present the new results for the simple scattering cross section set and proposed transport coefficients for F- ions in BF3 that can be used in such models. Nanbu’s theory based on thermodynamic threshold energies and separating elastic and reactive collisions is used to calculate cross sections for binary collisions of ions with atoms and molecules. For the cases in which the measured transport coefficients were available Momentum Transfer theory (MTT) was applied in order to unfold the cross sections from the measured transport data. Direct Monte Carlo method is applied to obtain swarm parameters at the temperature of T=300 K.

Keywords

• negative ions
• f- ion
• transport coefficients
• global model
• monte carlo
• cross sections