Micromachining And Pattering In Micro/Nano Scale On Macroscopic Areas

Abstract

This paper presents detailed discussion of selected examples of laser technologies for the modification of solid surfaces, including topographic and microstructural changes as well as both these alterations simultaneously. Laser surface micromachining has just entered the new generation of technologies that are used in surface engineering. It will be shown on the examples of applications in bioengineering, on the base of the author’s own research, in modification of materials such as titanium and its alloys, diamond-like layers (DLC) deposited on silicon and polymer substrates.

Keywords

• lasers
• surface modification
• texturing
• interference lithography
• direct writing