Metrological Array of Cyber-Physical Systems. Part 13. Segmental Approximation for Surface Topology Reconstruction

Abstract

This article presents the segment approximation method for surface topology reconstruction from white light interferogram. The method involves polynomial approximation of separate interferogram segments, and polynomial coefficients are computed at calibration stage. Metrological properties of proposed method are investigated by interferogram modeling tilted and spherical surfaces.

Keywords

• White-Light Interferometry
• Topology Reconstruction
• Mathematical Model
• Approximation
• Peak Detection
• Optical Metrology.