Micromachines (Aug 2021)

Scratch Morphology Transformation: An Alternative Method of Scratch Processing on Optical Surface

  • Guangqi Zhou,
  • Ye Tian,
  • Feng Shi,
  • Ci Song,
  • Guipeng Tie,
  • Shijie Liu,
  • Gang Zhou,
  • Jianda Shao,
  • Zhouling Wu

DOI
https://doi.org/10.3390/mi12091030
Journal volume & issue
Vol. 12, no. 9
p. 1030

Abstract

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The scratches on an optical surface can worsen the performance of elements. The normal process method is removing scratches entirely. However, it is a tough and high-cost requirement of removing extremely deep scratches and maintaining all the other excellent indicators at the same time. As the alternative of removing, we propose the method of scratch morphology transformation to diminish the drawbacks induced by scratches. We measure the morphology of scratches, establish the transformation models and transform them to the needed shape. In engineering applications, transformation can solve scratch drawbacks or limitations in an efficient and effective way. Then, residual scratches become acceptable. The transformation can also be amalgamated into the error figuring processes. Typical scratch transforming examples are experimented and AFM measurement is conducted. We explore the rule of scratch morphology transformation by two typical fabrication means: magnetorheological finishing (MRF) and HF etching. This morphology transforming method is an economical alternative for current defect-free fabrication. That will significantly decrease fabrication time, cost and risk, while the optical quality maintain.

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