Fabrication and Characterization of Lead-Free BNT-6BT Ultrasonic Transducers Designed by an Intelligent Optimization Algorithm
Junshan Zhang,
Jianxin Zhao,
Yi Quan,
Jingrong He,
Yi Li,
Zhe Wang,
Kun Zheng,
Jian Zhuang,
Zhishui Jiang,
Li Wen,
Wei Ren
Affiliations
Junshan Zhang
Electronic Materials Research Laboratory, Key Laboratory of the Ministry of Education & International Center for Dielectric Research, School of Electronic Science and Engineering, Xi’an Jiaotong University, Xi’an 710049, China
Jianxin Zhao
School of Microelectronics, Xidian University, Xi’an 710071, China
Yi Quan
School of Microelectronics, Xidian University, Xi’an 710071, China
Jingrong He
School of Microelectronics, Xidian University, Xi’an 710071, China
Yi Li
School of Microelectronics, Xidian University, Xi’an 710071, China
Zhe Wang
Electronic Materials Research Laboratory, Key Laboratory of the Ministry of Education & International Center for Dielectric Research, School of Electronic Science and Engineering, Xi’an Jiaotong University, Xi’an 710049, China
Kun Zheng
Electronic Materials Research Laboratory, Key Laboratory of the Ministry of Education & International Center for Dielectric Research, School of Electronic Science and Engineering, Xi’an Jiaotong University, Xi’an 710049, China
Jian Zhuang
Electronic Materials Research Laboratory, Key Laboratory of the Ministry of Education & International Center for Dielectric Research, School of Electronic Science and Engineering, Xi’an Jiaotong University, Xi’an 710049, China
Zhishui Jiang
Guangdong JC Technological Innovation Electronics Co., Ltd., Zhaoqing 526000, China
Li Wen
Guangdong JC Technological Innovation Electronics Co., Ltd., Zhaoqing 526000, China
Wei Ren
Electronic Materials Research Laboratory, Key Laboratory of the Ministry of Education & International Center for Dielectric Research, School of Electronic Science and Engineering, Xi’an Jiaotong University, Xi’an 710049, China
Lead-free piezoelectric material-based ultrasonic transducers have been researched for several years, but the inefficient properties and design difficulties have troubled lead-free ultrasonic transducers for a long time. To improve the performance and design efficiency of lead-free ultrasonic transducers, in this work, an equivalent circuit model and intelligent optimization algorithm were combined for use in a transducer design. Firstly, 0.94(Bi0.5Na0.5)TiO3-0.06BaTiO3(BNT-6BT) lead-free piezoelectric ceramics were prepared and characterized. Then, BNT-6BT ceramics were used to fabricate the ultrasonic transducers. An equivalent circuit model-based software, PiezoCAD, and a genetic algorithm-based back-propagation neural network were used to optimize the design of the transducers. A 3.03 MHz center frequency and 60.3% −6 dB bandwidth of the optimized transducers were achieved, which were consistent with the neural networks optimization results. To verify the application potential of the lead-free transducers, tungsten rods phantom imaging and polystyrene spheres with 300 μm diameter manipulation were completed by the transducers, and the experiment results indicate that the BNT-6BT lead-free transducers have great potential in further biological and biomedical applications.