Journal of the Mechanical Behavior of Materials (Jun 2000)

TiN THIN FILMS: DEFECT GENERATION, RESIDUAL STRESSES AND HARDNESS

  • Hultman, Lars,
  • Sundgren, Jan-Eric

DOI
https://doi.org/10.1515/JMBM.2000.11.1-3.59
Journal volume & issue
Vol. 11, no. 1-3
pp. 59 – 62

Abstract

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