Study on scattering light field distribution of optical element in-surface defects based on Mueller matrix
Hongjun Wang,
Yingge Zhang,
Dasen Wang,
Bingcai Liu,
Xueliang Zhu,
Ailing Tian
Affiliations
Hongjun Wang
Shaanxi Province Key Laboratory of Membrane Technology and Optical Test, School of Optoelectronic Engineering, Xi’an Technological University, Shaanxi, Xi’an 710021, China
Yingge Zhang
Shaanxi Province Key Laboratory of Membrane Technology and Optical Test, School of Optoelectronic Engineering, Xi’an Technological University, Shaanxi, Xi’an 710021, China
Dasen Wang
Shaanxi Province Key Laboratory of Membrane Technology and Optical Test, School of Optoelectronic Engineering, Xi’an Technological University, Shaanxi, Xi’an 710021, China
Bingcai Liu
Shaanxi Province Key Laboratory of Membrane Technology and Optical Test, School of Optoelectronic Engineering, Xi’an Technological University, Shaanxi, Xi’an 710021, China
Xueliang Zhu
Shaanxi Province Key Laboratory of Membrane Technology and Optical Test, School of Optoelectronic Engineering, Xi’an Technological University, Shaanxi, Xi’an 710021, China
Ailing Tian
Shaanxi Province Key Laboratory of Membrane Technology and Optical Test, School of Optoelectronic Engineering, Xi’an Technological University, Shaanxi, Xi’an 710021, China
For precise optical elements, the size of in-surface defects is at the nanometer scale. When incident light illuminates in-surface defects on optical elements, strong diffraction and scattering effects are produced, and this greatly reduces the beam quality in optical systems. In this study, a three-dimensional model of the in-surface defects of K9 optical components was established. On this basis, a theoretical model of electromagnetic scattering between the defect and the incident and scattering fields was constructed. The 4 × 4-order scattering Mueller matrix light field distributions of incident light modulated by different-sized defects were obtained by numerical simulations, and the influencing factors were analyzed. These simulations provide a theoretical basis and a reference for the manufacture of precision optical elements and a scale calibration for surface quality detection methods.
