AIP Advances (May 2020)

Response properties of nitrogen dioxide gas sensors with tin oxide decorated carbon nanotube channel fabricated by two-step dielectrophoretic assembly

  • Masafumi Inaba,
  • Masaki Kono,
  • Takenori Oda,
  • Nisarut Phansiri,
  • Michihiko Nakano,
  • Junya Suehiro

DOI
https://doi.org/10.1063/5.0008188
Journal volume & issue
Vol. 10, no. 5
pp. 055223 – 055223-6

Abstract

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Gas sensors with carbon nanotubes (CNTs) and tin dioxide (SnO2) nanoparticles for nitrogen dioxide (NO2) detection are fabricated using a two-step dielectrophoretic (DEP) assembly method, and the NO2 gas detection properties are investigated. For the fabrication of the sensor, CNTs assemble between electrodes by a DEP force, followed by SnO2 nanoparticle decoration also by a DEP assembly method, and the assembled CNTs act as high electric field electrodes. The formed CNT/SnO2 gas sensors exhibit a sharp increase in resistance followed by a gradual decrease upon NO2 exposure. pn hetero-junctions are formed between the CNTs and the SnO2 nanoparticles, and the resistance shift of the depletion region in the CNTs at the pn hetero-junction induces the sharp increase in the resistance.