Micromachines (Jul 2024)

Bearingless Inertial Rotational Stage for Atomic Force Microscopy

  • Eva Osuna,
  • Aitor Zambudio,
  • Pablo Ares,
  • Cristina Gómez-Navarro,
  • Julio Gómez-Herrero

DOI
https://doi.org/10.3390/mi15070903
Journal volume & issue
Vol. 15, no. 7
p. 903

Abstract

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We introduce a novel rotational stage based on inertial motion, designed to be lightweight, compact, and fully compatible with atomic force microscopy (AFM) systems. Our characterization of this stage demonstrates high angular precision, achieving a maximum rotational speed of 0.083 rad/s and a minimum angular step of 11.8 μrad. The stage exhibits reliable performance, maintaining continuous operation for extended periods. When tested within an AFM setup, the stage deliveres excellent results, confirming its efficacy for scanning probe microscopy studies.

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