Long-term high-temperature behavior of Ti–Al based electrodes for surface acoustic wave devices

Abstract

The long-term high-temperature behavior of Ti–Al based electrodes for the application in surface acoustic wave (SAW) sensor devices was analyzed. The electrodes were obtained by e-beam evaporation of Ti/Al multilayers on the high-temperature stable piezoelectric Ca3TaGa3Si2O14 (CTGS) substrates and structuring via the lift-off process. AlNO (25 at.% Al; 60 at.% N and 15 at.% O) cover and barrier layers were applied as protection against oxidation from the surrounding atmosphere and to prohibit a chemical reaction with the substrate. The samples were annealed at temperatures up to 600 °C in air for a duration of up to 192 h. Scanning and transmission electron microscopy were used to evaluate the morphology and degradation of the electrodes as well as of the extended contact pads. The results revealed that the Ti–Al based electrodes remained unoxidized after annealing for 192 h at 400 and 500 °C and for 24 h at 600 °C. After the heat treatment for 192 h at 600 °C, a strong oxidation of the structured electrodes occurred, which was less pronounced within the pads. In summary, the investigation showed that Ti–Al based SAW devices are a cost efficient alternative for long-term applications up to at least 500 °C and short- and medium-term applications up to 600 °C.

Keywords

• High-temperature
• Surface acoustic wave device
• Sensor
• TiAl electrodes
• CTGS