Plasma-Chemical Disposal of Silicon and Germanium Tetrachlorides Waste by Hydrogen Reduction
Roman Kornev,
Igor Gornushkin,
Lubov Shabarova,
Alena Kadomtseva,
Georgy Mochalov,
Nikita Rekunov,
Sergey Romanov,
Vitaly Medov,
Darya Belousova,
Nikita Maleev
Affiliations
Roman Kornev
Institute of Chemistry and High-Purity Substances Named after G.G. Devyatykh, Russian Academy of Sciences, Tropinina, 49, 603951 Nizhny Novgorod, Russia
Igor Gornushkin
BAM Federal Institute for Materials Research and Testing, Richard-Willstätter-Strasse 11, 12489 Berlin, Germany
Lubov Shabarova
Institute of Chemistry and High-Purity Substances Named after G.G. Devyatykh, Russian Academy of Sciences, Tropinina, 49, 603951 Nizhny Novgorod, Russia
Alena Kadomtseva
Department of General Chemistry, Privolzhsky Research Medical University, Minina and Pozharskogo Square 10/1, 603005 Nizhny Novgorod, Russia
Georgy Mochalov
Department of Nanotechnology and Biotechnology, R.E. Alekseev Nizhny Novgorod Technical University, Minin St., 24, 603155 Nizhny Novgorod, Russia
Nikita Rekunov
Department of Nanotechnology and Biotechnology, R.E. Alekseev Nizhny Novgorod Technical University, Minin St., 24, 603155 Nizhny Novgorod, Russia
Sergey Romanov
Department of Nanotechnology and Biotechnology, R.E. Alekseev Nizhny Novgorod Technical University, Minin St., 24, 603155 Nizhny Novgorod, Russia
Vitaly Medov
Department of Nanotechnology and Biotechnology, R.E. Alekseev Nizhny Novgorod Technical University, Minin St., 24, 603155 Nizhny Novgorod, Russia
Darya Belousova
Department of Nanotechnology and Biotechnology, R.E. Alekseev Nizhny Novgorod Technical University, Minin St., 24, 603155 Nizhny Novgorod, Russia
Nikita Maleev
Department of Nanotechnology and Biotechnology, R.E. Alekseev Nizhny Novgorod Technical University, Minin St., 24, 603155 Nizhny Novgorod, Russia
The processes of hydrogen reduction of silicon and germanium chlorides under the conditions of high-frequency (40.68 MHz) counteracted arc discharge stabilized between two rod electrodes are investigated. The main gas-phase and solid products of plasma-chemical transformations are determined. Thermodynamic analysis of SiCl4 + H2 and GeCl4 + H2 systems for optimal process parameters was carried out. Using the example of hydrogen reduction of SiCl4 by the method of numerical modeling, gas-dynamic and thermal processes for this type of discharge are investigated. The impurity composition of gas-phase and solid reaction products is investigated. The possibility of single-stage production of high-purity Si and Ge mainly in the form of compact ingots, as well as high-purity chlorosilanes and trichlorogermane, is shown.
