Communications Materials (Oct 2022)

Hybrid molecular beam epitaxy of germanium-based oxides

  • Fengdeng Liu,
  • Tristan K. Truttmann,
  • Dooyong Lee,
  • Bethany E. Matthews,
  • Iflah Laraib,
  • Anderson Janotti,
  • Steven R. Spurgeon,
  • Scott A. Chambers,
  • Bharat Jalan

DOI
https://doi.org/10.1038/s43246-022-00290-y
Journal volume & issue
Vol. 3, no. 1
pp. 1 – 8

Abstract

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Germanium-based oxides are wide bandgap semiconductors with the prospects of ambipolar doping. Here, a hybrid molecular beam epitaxy is demonstrated for the growth of both rutile Sn1-x Ge x O2 and perovskite SrSn1-x Ge x O3 films.