Mechanically-Tunable Photonic Devices with On-Chip Integrated MEMS/NEMS Actuators

Micromachines. 2016;7(4):69 DOI 10.3390/mi7040069

 

Journal Homepage

Journal Title: Micromachines

ISSN: 2072-666X (Online)

Publisher: MDPI AG

LCC Subject Category: Technology: Mechanical engineering and machinery

Country of publisher: Switzerland

Language of fulltext: English

Full-text formats available: PDF, HTML, ePUB, XML

 

AUTHORS

Han Du (Department of Mechanical Engineering, National University of Singapore, 9 Engineering Drive 1, Singapore 117575)
Fook Siong Chau (Department of Mechanical Engineering, National University of Singapore, 9 Engineering Drive 1, Singapore 117575)
Guangya Zhou (Department of Mechanical Engineering, National University of Singapore, 9 Engineering Drive 1, Singapore 117575)

EDITORIAL INFORMATION

Blind peer review

Editorial Board

Instructions for authors

Time From Submission to Publication: 11 weeks

 

Abstract | Full Text

This article reviews mechanically-tunable photonic devices with on-chip integrated MEMS/NEMS actuators. With related reports mostly published within the last decade, this review focuses on the tuning mechanisms of various passive silicon photonic devices, including tunable waveguides, couplers, ring/disk resonators, and photonic crystal cavities, and their results are selectively elaborated upon and compared. Applications of the mechanisms are also discussed. Future development of mechanically-tunable photonics is considered and one possible approach is based on plasmonics, which can confine light energy in the nano-scale space. Optomechanics is another innovation, derived from the strong coupling of optical and mechanical degrees of freedom. State-of-the-art studies of mechanically-tunable plasmonics and on-chip optomechanics are also selectively reviewed.