Synthesis and Characterization of Nanocrystalline Boron-Nitride Thin Films by Ion Milling and Thermal Treatment for Tribological Coatings: An Approach to Quantifying the Growth Dynamic Process

Abstract

Hexagonal boron-nitride nanoparticle coating was deposited on AISI 1045 steel surface. The deposition process included a transformation of B-containing thin organic film into nanocrystalline BN using two methods: thermal annealing at 450–850 °C and reactive ion etching in Ar/N2 plasma. The film structure, phases, and film morphology of deposited nanoparticles of boron nitride on AISI 1045 steel were characterized by XPS, XRD, and EDS. Post-annealing at 450 °C does not lead to the formation of a BN phase in the layer. A non-stoichiometric BN phase with nitrogen deficiency appears at 650 °C. At 850 °C annealing, the formed BN phase is completely stoichiometric. The effects of deposited and incorporated BN on the friction and hardness properties of AISI 1045 steel were also studied. The post-annealing process improved the hardness from 5.35 to 11.4 GPa, showing a pronounced linear temperature dependence. An original approach was adopted to quantify the energy-dependent growth constants based on the indentation load-discharge curves measured on samples treated under different conditions. Those constants describe the rate of the reactions and the type of interdiffusion process characteristic for each material used. This approach can partially fulfill the role of the Rutherford backscattering spectrometry profile, which is an expensive and time-consuming process, mainly when light elements such as boron and nitrogen are used.

Keywords

• energy-dependent growth constants
• tribology
• plasma-enhanced surface modification
• hardness improvement
• reactive ion etching (RIE)
• nanocrystalline BN