Correlation between electric parameters of carbon layers and their capacity for field emission

Abstract

The aim of this work is to study a possibility of field electron emission from carbon layers produced by radio frequency plasma chemical vapor deposition (RF PCVD) method. A correlation between electric parameters of the layers and the ability to produce electron emission is also studied through material (AFM) and electrical (C-V, I-V) characterization of the obtained layers. It is demonstrated that the layers deposited with the highest self-bias exhibit the highest capacity for electron emission.

Keywords

• carbon layers
• diamond-like carbon (DLC)
• field emission
• RF PCVD
• AFM
• capacitance-voltage (C-V)