Flexible capacitive pressure sensor based on interdigital electrodes with porous microneedle arrays for physiological signal monitoring

Abstract

Flexible pressure sensors have many potential applications in the monitoring of physiological signals because of their good biocompatibility and wearability. However, their relatively low sensitivity, linearity, and stability have hindered their large-scale commercial application. Herein, a flexible capacitive pressure sensor based on an interdigital electrode structure with two porous microneedle arrays (MNAs) is proposed. The porous substrate that constitutes the MNA is a mixed product of polydimethylsiloxane and NaHCO3. Due to its porous and interdigital structure, the maximum sensitivity (0.07 kPa−1) of a porous MNA-based pressure sensor was found to be seven times higher than that of an imporous MNA pressure sensor, and it was much greater than that of a flat pressure sensor without a porous MNA structure. Finite-element analysis showed that the interdigital MNA structure can greatly increase the strain and improve the sensitivity of the sensor. In addition, the porous MNA-based pressure sensor was found to have good stability over 1500 loading cycles as a result of its bilayer parylene-enhanced conductive electrode structure. Most importantly, it was found that the sensor could accurately monitor the motion of a finger, wrist joint, arm, face, abdomen, eye, and Adam’s apple. Furthermore, preliminary semantic recognition was achieved by monitoring the movement of the Adam’s apple. Finally, multiple pressure sensors were integrated into a 3 × 3 array to detect a spatial pressure distribution. Compared to the sensors reported in previous works, the interdigital electrode structure presented in this work improves sensitivity and stability by modifying the electrode layer rather than the dielectric layer.