Effective Young’s Modulus of Complex Three Dimensional Multilayered Ti/Au Micro-Cantilevers Fabricated by Electrodeposition and the Temperature Dependency
Hitomi Watanabe,
Tso-Fu Mark Chang,
Michael Schneider,
Ulrich Schmid,
Chun-Yi Chen,
Shinichi Iida,
Daisuke Yamane,
Hiroyuki Ito,
Katsuyuki Machida,
Kazuya Masu,
Masato Sone
Affiliations
Hitomi Watanabe
Institute of Innovative Research, Tokyo Institute of Technology, Kanagawa 226-8503, Japan
Tso-Fu Mark Chang
Institute of Innovative Research, Tokyo Institute of Technology, Kanagawa 226-8503, Japan
Michael Schneider
Institute of Sensor and Actuator Systems, Vienna University of Technology, Gußhausstraße 27-29, 1040 Wien, Austria
Ulrich Schmid
Institute of Sensor and Actuator Systems, Vienna University of Technology, Gußhausstraße 27-29, 1040 Wien, Austria
Chun-Yi Chen
Institute of Innovative Research, Tokyo Institute of Technology, Kanagawa 226-8503, Japan
Shinichi Iida
NTT Advanced Technology Corporation, Atsugi 243-0124, Kanagawa, Japan
Daisuke Yamane
Department of Mechanical Engineering, Ritsumeikan University, 1-1-1 Noji-Higashi, Kusatsu 525-8577, Shiga, Japan
Hiroyuki Ito
Institute of Innovative Research, Tokyo Institute of Technology, Kanagawa 226-8503, Japan
Katsuyuki Machida
Institute of Innovative Research, Tokyo Institute of Technology, Kanagawa 226-8503, Japan
Kazuya Masu
Institute of Innovative Research, Tokyo Institute of Technology, Kanagawa 226-8503, Japan
Masato Sone
Institute of Innovative Research, Tokyo Institute of Technology, Kanagawa 226-8503, Japan
Ti/Au multi-layered micro-cantilevers with complex three-dimensional structures used as micro-components in micro-electromechanical systems (MEMS) sensors were prepared by lithography and electrodeposition, and the effective Young’s modulus was evaluated by the resonance frequency method and finite element method simulation. Effects of the constraint condition at the fixed-end of the micro-cantilever and the temperature dependency of the effective Young’s modulus were studied. Three types of the constraint at the fixed-end were prepared, which were normal type (constraining only bottom surface of the fixed-end), block type (constraining both top and bottom surfaces), and bridge type (top surfaces covering with a bridge-like structure). The temperature dependency test was conducted in a temperature range from 150 to 300 °C in a vacuum chamber. An increase in the effective Young’s modulus was observed as the constraint condition became more rigid, and the effective Young’s modulus merely changed as the temperature varied from room temperature to 300 °C.