Foldable-circuit-enabled miniaturized multifunctional sensor for smart digital dust
Chun-Yu You,
Bo-Fan Hu,
Bo-Rui Xu,
Zi-Yu Zhang,
Bin-Min Wu,
Gao-Shan Huang,
En-Ming Song,
Yong-Feng Mei
Affiliations
Chun-Yu You
Department of Materials Science & State Key Laboratory of Molecular Engineering of Polymers, Fudan University, Shanghai 200438, People's Republic of China; Shanghai Frontiers Science Research Base of Intelligent Optoelectronics and Perception, Institute of Optoelectronics, Fudan University, Shanghai 200438, People's Republic of China
Bo-Fan Hu
Department of Materials Science & State Key Laboratory of Molecular Engineering of Polymers, Fudan University, Shanghai 200438, People's Republic of China; Shanghai Frontiers Science Research Base of Intelligent Optoelectronics and Perception, Institute of Optoelectronics, Fudan University, Shanghai 200438, People's Republic of China
Bo-Rui Xu
Department of Materials Science & State Key Laboratory of Molecular Engineering of Polymers, Fudan University, Shanghai 200438, People's Republic of China
Zi-Yu Zhang
Department of Materials Science & State Key Laboratory of Molecular Engineering of Polymers, Fudan University, Shanghai 200438, People's Republic of China
Bin-Min Wu
Department of Materials Science & State Key Laboratory of Molecular Engineering of Polymers, Fudan University, Shanghai 200438, People's Republic of China
Gao-Shan Huang
Department of Materials Science & State Key Laboratory of Molecular Engineering of Polymers, Fudan University, Shanghai 200438, People's Republic of China; International Institute of Intelligent Nanorobots and Nanosystems, Fudan University, Shanghai 200438, People's Republic of China
En-Ming Song
Department of Materials Science & State Key Laboratory of Molecular Engineering of Polymers, Fudan University, Shanghai 200438, People's Republic of China; Shanghai Frontiers Science Research Base of Intelligent Optoelectronics and Perception, Institute of Optoelectronics, Fudan University, Shanghai 200438, People's Republic of China; Corresponding author at : Department of Materials Science, International Institute of Intelligent Nanorobots and Nanosystems, State Key Laboratory of ASIC and Systems, Fudan University, Shanghai 200433, China.
Yong-Feng Mei
Department of Materials Science & State Key Laboratory of Molecular Engineering of Polymers, Fudan University, Shanghai 200438, People's Republic of China; Shanghai Frontiers Science Research Base of Intelligent Optoelectronics and Perception, Institute of Optoelectronics, Fudan University, Shanghai 200438, People's Republic of China; International Institute of Intelligent Nanorobots and Nanosystems, Fudan University, Shanghai 200438, People's Republic of China; Yiwu Research Institute of Fudan University, Yiwu 322000, Zhejiang, People's Republic of China; Corresponding author at : Department of Materials Science, International Institute of Intelligent Nanorobots and Nanosystems, State Key Laboratory of ASIC and Systems, Fudan University, Shanghai 200433, China.
Smart dust, which refers to miniaturized, multifunctional sensor motes, would open up data acquisition opportunities for Internet of Things (IoT) and Environmental protection applications. However, critical obstacles remain challenging in the integration of high-density sensors, further miniaturization of device platforms, and reduction of cost. Here, we demonstrate the concept of smart digital dust to address these problems, the results of which combine the benefit of (i) maturity of complementary metal-oxide semiconductor (CMOS) processing approaches and (ii) unique form factors of emerging flexible electronics. As a prototype for smart digital dust, we present a millimeter-scale multifunctional optoelectronic sensor platform consisting of high-performance optoelectronic sensor cores and commercially available integrated-circuit components. The smart material-assisted optoelectronic sensing mechanism enables real-time, high-sensitivity hydrogen, temperature, and relative humidity (RH) sensing based on a single chip with ultralow power consumption. Such a microsystem presented here introduces a viable solution to the multifunctional sensing need of IoT and could serve as a building block for the rapidly evolving future framework of smart dust.
