Tekhnologiya i Konstruirovanie v Elektronnoi Apparature (Jun 2013)

Dual-function pressure-temperature sensor based on silicon whiskers

  • Druzhinin A. A.,
  • Kutrakov A. P.,
  • Liakh-Kaguy N. S.,
  • Vuitsyk A. M.

Journal volume & issue
no. 4
pp. 23 – 26

Abstract

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The article presents the design of a pressure-temperature sensor based on p-type silicon whiskers, doped with boron, with a resistivity of 0,005 Ohm?cm. The sensor is operable in a temperature range from –100 to +200°C and at pressures from 0 to 20 MPa. The sensor is designed for a wide range of applications.

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