Influence of the Ion Mass in the Radial to Orbital Transition in Weakly Collisional Low-Pressure Plasmas Using Cylindrical Langmuir Probes

Abstract

This paper presents an experimentally observed transition from the validity of the radial theories to the validity of the orbital theories that model the ion current collected by a cylindrical Langmuir probe immersed in low-pressure, low-temperature helium plasma when it is negatively biased with respect to the plasma potential, as a function of the positive ion-neutral collision mean free path to the Debye length ratio Λ=λ+/λD. The study has been also conducted on argon and neon plasmas, which allows a comparison based on the mass of the ions, although no transition has been observed for these gases. As the radial or orbital behavior of the ions is essential to establish the validity of the different sheath theories, a theoretical analysis of such a transition not only as a function of the parameters Λ and β=T+/Te, T+ and Te being the positive ion and electron temperature, respectively, but also as a function of the ion mass is provided. This study allows us to recognize the importance of the mass of the ion as the parameter that explains the transition in helium plasmas. Motivated by these theoretical arguments, a novel set of measurements has been performed to study the relationship between the Λ and β parameters in the transition that demonstrate that the effect of the ion mean free path cannot be completely ignored and also that its influence on the ion current collected by the probe is less important than the effect of the ion temperature.

Keywords

• plasma surface technology
• cold plasma
• ion temperature
• ion-neutral charge-exchange collisions
• ion mean free path
• plasma diagnosis