Collective fabrication of guided longitudinal SAW resonator without Bragg grating mirror

Abstract

Abstract This Research article document discussed about a new structure composed of a sub‐micron‐thick layer of a single‐crystal piezoelectric material on a substrate. Longitudinal waves are used for experimental demonstration with 4’’ collective processes. Electrical experimental–computation validate the concept with Q × f products near 1012.

Keywords

• 5G mobile communication
• acoustic devices
• etching
• microfabrication
• nanofabrication
• piezoelectric devices