Nano-Micro Letters (Oct 2022)

Recent Progress on Flexible Room-Temperature Gas Sensors Based on Metal Oxide Semiconductor

  • Lang-Xi Ou,
  • Meng-Yang Liu,
  • Li-Yuan Zhu,
  • David Wei Zhang,
  • Hong-Liang Lu

DOI
https://doi.org/10.1007/s40820-022-00956-9
Journal volume & issue
Vol. 14, no. 1
pp. 1 – 42

Abstract

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Abstract With the rapid development of the Internet of Things, there is a great demand for portable gas sensors. Metal oxide semiconductors (MOS) are one of the most traditional and well-studied gas sensing materials and have been widely used to prepare various commercial gas sensors. However, it is limited by high operating temperature. The current research works are directed towards fabricating high-performance flexible room-temperature (FRT) gas sensors, which are effective in simplifying the structure of MOS-based sensors, reducing power consumption, and expanding the application of portable devices. This article presents the recent research progress of MOS-based FRT gas sensors in terms of sensing mechanism, performance, flexibility characteristics, and applications. This review comprehensively summarizes and discusses five types of MOS-based FRT gas sensors, including pristine MOS, noble metal nanoparticles modified MOS, organic polymers modified MOS, carbon-based materials (carbon nanotubes and graphene derivatives) modified MOS, and two-dimensional transition metal dichalcogenides materials modified MOS. The effect of light-illuminated to improve gas sensing performance is further discussed. Furthermore, the applications and future perspectives of FRT gas sensors are also discussed.

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