Nano-Scale Structure Investigation of Vapour Deposited AlCrSiN Coating Using Transmission Electron Microscope Techniques

Abstract

The investigations concerned the structural analysis of the AlCrSiN coating deposited by arc Physical Vapour Deposition method on the X40CrMoV5-1 hot work tool steel substrate. The deposition process was carried out on a device equipped with a technique of lateral, rotating cathodes. The nano/microstructure, phase identification and chemical state of the coating were analysed by high-resolution transmission electron microscopy. It was found that the investigated coatings have nanostructured nature consisting of fine crystallites. The fractographic tests were made using the scanning electron microscope and allow to state, that the coating was deposited uniformly and tightly adhere to the substrate material. In the work is presented the nature of a transition zone between the produced AlCrSiN coating and substrate material.

Keywords

• AlCrSiN coating
• PVD
• HRTEM
• SEM
• nano-scale