Self-Calibrated Humidity Sensor in CMOS without Post-Processing

Abstract

A 1.1 µW power dissipation, voltage-output humidity sensor with 10% relative humidity accuracy was developed in the LFoundry 0.15 µm CMOS technology without post-processing. The sensor consists of a woven lateral array of electrodes implemented in CMOS top metal, a humidity-sensitive layer of Intervia Photodielectric 8023D-10, a CMOS capacitance to voltage converter, and the self-calibration circuitry.

Keywords

• capacitive sensors
• microsensors
• humidity measurement
• CMOS integrated circuits