Journal of Electrical and Electronics Engineering (Oct 2017)
Microwave Assisted Processing for the Realization of Nano - Ceramics Susceptors from SiC
Abstract
The Interest in the manufacture of nanostructured ceramic devices has increased lately, due to miniaturized requirements, multifunctionality and improved reliability. The main obstacle to achieving the full potential of susceptible nano - ceramics is to prevent unwanted growths, while high densification is achieved during conventional high - temperature processing. In these experiments, detailed studies have been carried out on the manufacture of microwave assisted ceramic susceptors.