Displacement measurement of the compliant positioning stage based on a computer micro-vision method
Heng Wu,
Xianmin Zhang,
Ruizhou Wang,
Zhenya He
Affiliations
Heng Wu
Guangdong Provincial Key Laboratory of Precision Equipment and Manufacturing Technology, School of Mechanical and Automotive Engineering, South China University of Technology, Guangzhou, 510640, China
Xianmin Zhang
Guangdong Provincial Key Laboratory of Precision Equipment and Manufacturing Technology, School of Mechanical and Automotive Engineering, South China University of Technology, Guangzhou, 510640, China
Ruizhou Wang
Guangdong Provincial Key Laboratory of Precision Equipment and Manufacturing Technology, School of Mechanical and Automotive Engineering, South China University of Technology, Guangzhou, 510640, China
Zhenya He
Guangdong Provincial Key Laboratory of Precision Equipment and Manufacturing Technology, School of Mechanical and Automotive Engineering, South China University of Technology, Guangzhou, 510640, China
We propose a practical computer micro-vision-based method for displacement measurements of the compliant positioning stage. The algorithm of the proposed method is based on a template matching approach composed of an integer-pixel search and a sub-pixel search. By combining with an optical microscopy, a high resolution CCD camera and the proposed algorithm, an extremely high measuring precision is achieved. Various simulations and experiments are conducted. The simulation results demonstrate that the matching precision can reach to 0.01 pixel when the noise interference is low. A laser interferometer measurement system (LIMS) is established for comparison. The experimental results indicate that the proposed method possesses the same performance as the LIMS but exhibits a greater flexibility and operability. The measuring precision can theoretically attain to 2.83 nm/pixel.
