Microsystems & Nanoengineering (Jan 2024)
Correction: Integrated silicon photonic MEMS
- Niels Quack,
- Alain Yuji Takabayashi,
- Hamed Sattari,
- Pierre Edinger,
- Gaehun Jo,
- Simon J. Bleiker,
- Carlos Errando-Herranz,
- Kristinn B. Gylfason,
- Frank Niklaus,
- Umar Khan,
- Peter Verheyen,
- Arun Kumar Mallik,
- Jun Su Lee,
- Moises Jezzini,
- Iman Zand,
- Padraic Morrissey,
- Cleitus Antony,
- Peter O’Brien,
- Wim Bogaerts
Affiliations
- Niels Quack
- École Polytechnique Fédérale de Lausanne (EPFL)
- Alain Yuji Takabayashi
- École Polytechnique Fédérale de Lausanne (EPFL)
- Hamed Sattari
- École Polytechnique Fédérale de Lausanne (EPFL)
- Pierre Edinger
- Division of Micro and Nanosystems, KTH Royal Institute of Technology
- Gaehun Jo
- Division of Micro and Nanosystems, KTH Royal Institute of Technology
- Simon J. Bleiker
- Division of Micro and Nanosystems, KTH Royal Institute of Technology
- Carlos Errando-Herranz
- Division of Micro and Nanosystems, KTH Royal Institute of Technology
- Kristinn B. Gylfason
- Division of Micro and Nanosystems, KTH Royal Institute of Technology
- Frank Niklaus
- Division of Micro and Nanosystems, KTH Royal Institute of Technology
- Umar Khan
- Department of Information Technology, Photonics Research Group, Ghent University - IMEC
- Peter Verheyen
- imec vzw. 3DSIP Department, Si Photonics Group
- Arun Kumar Mallik
- Tyndall National Institute
- Jun Su Lee
- Tyndall National Institute
- Moises Jezzini
- Tyndall National Institute
- Iman Zand
- Department of Information Technology, Photonics Research Group, Ghent University - IMEC
- Padraic Morrissey
- Tyndall National Institute
- Cleitus Antony
- Tyndall National Institute
- Peter O’Brien
- Tyndall National Institute
- Wim Bogaerts
- Department of Information Technology, Photonics Research Group, Ghent University - IMEC
- DOI
- https://doi.org/10.1038/s41378-023-00649-2
- Journal volume & issue
-
Vol. 10,
no. 1
pp. 1 – 1
Abstract
No abstracts available.