Microsystems & Nanoengineering (Jan 2024)

Aerosol jet printing of surface acoustic wave microfluidic devices

  • Joseph Rich,
  • Brian Cole,
  • Teng Li,
  • Brandon Lu,
  • Hanyu Fu,
  • Brittany N. Smith,
  • Jianping Xia,
  • Shujie Yang,
  • Ruoyu Zhong,
  • James L. Doherty,
  • Kanji Kaneko,
  • Hiroaki Suzuki,
  • Zhenhua Tian,
  • Aaron D. Franklin,
  • Tony Jun Huang

DOI
https://doi.org/10.1038/s41378-023-00606-z
Journal volume & issue
Vol. 10, no. 1
pp. 1 – 12

Abstract

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Abstract The addition of surface acoustic wave (SAW) technologies to microfluidics has greatly advanced lab-on-a-chip applications due to their unique and powerful attributes, including high-precision manipulation, versatility, integrability, biocompatibility, contactless nature, and rapid actuation. However, the development of SAW microfluidic devices is limited by complex and time-consuming micro/nanofabrication techniques and access to cleanroom facilities for multistep photolithography and vacuum-based processing. To simplify the fabrication of SAW microfluidic devices with customizable dimensions and functions, we utilized the additive manufacturing technique of aerosol jet printing. We successfully fabricated customized SAW microfluidic devices of varying materials, including silver nanowires, graphene, and poly(3,4-ethylenedioxythiophene) polystyrene sulfonate (PEDOT:PSS). To characterize and compare the acoustic actuation performance of these aerosol jet printed SAW microfluidic devices with their cleanroom-fabricated counterparts, the wave displacements and resonant frequencies of the different fabricated devices were directly measured through scanning laser Doppler vibrometry. Finally, to exhibit the capability of the aerosol jet printed devices for lab-on-a-chip applications, we successfully conducted acoustic streaming and particle concentration experiments. Overall, we demonstrated a novel solution-based, direct-write, single-step, cleanroom-free additive manufacturing technique to rapidly develop SAW microfluidic devices that shows viability for applications in the fields of biology, chemistry, engineering, and medicine.