Highly Linear and Wide Non-Resonant Two-Degree-of-Freedom Piezoelectric Laser Scanner

Abstract

Laser scanners with mechanically driven mirrors have exhibited increasing potential for various applications, such as displays and laser radar. Resonant scanners are the predominantly used scanners; however, non-resonant scanners are required for applications where point-to-point driving is desirable. Because a non-resonant drive cannot amplify the drive angle owing to the resonance phenomenon, high values are difficult to achieve for the main performance metrics of the scanners: mirror area, drive angle, and operating frequency. In this paper, we present a two-axis scanner with a piezoelectric actuator made of a piezoelectric single-crystal Pb(In1/2Nb1/2)O3-Pb(Mg1/3Nb2/3)O3-PbTiO3 as the actuation force source. The scanner contains a circular mirror with a diameter of 7 mm and achieves an average static mechanical deflection angle amplitude of 20.8° in two axes with a resonant frequency of 559 Hz. It is equipped with a transmission mechanism that can decouple each axis to achieve high linearity; in our study, the nonlinearity error was less than 1°.

Keywords

• piezoelectric actuator
• scanning mirror
• PIN-PMN-PT
• compliant mechanism