Machining of optical micro-mold by laser-induced chemical etching

Abstract

Triangular grating has an important application in modern optical field. The large-scale production of such components can be realized by injection molding process, among which the fabrication of optical molds is the most important technology. This paper proposed to adopt femtosecond laser-induced chemical etching to make a micro-mold based on triangular diffraction gratings. Based on theoretical analysis and processing experiments, we studied the feasibility applied to manufacture the microstructure of optical mold.